Application of Inkjet-Printing Technology to Micro- Electro-Mechanical Systems
نویسندگان
چکیده
Application of Inkjet-Printing Technology to Micro-Electro-Mechanical Systems
منابع مشابه
Ink-Jet Printing of Micro-Electro-Mechanical Systems (MEMS)
Beyond printing text on paper, inkjet printing methods have recently been applied to print passive electrical and optical microparts, such as conductors, resistors, solder bumps and polymeric micro lenses. They are also useful to print micro-electro-mechanical systems (MEMS) as sub-millimeter sensor and actuator arrays, such as multifunctional skins applicable to robotic application and ambient...
متن کاملMaskless Lithography Using Drop-On-Demand Inkjet Printing Method
Writing process patterns directly on a substrate with small liquid droplets generated by Drop-On-Demand (DOD) inkjet devices offers a low cost, non-contact, low temperature, flexible, and data driven patterning approach. Existing inkjet printheads have a limited number of inkjet devices, which generate droplets on the scale of tens of microns. In our research, we have developed a monolithic ink...
متن کاملA Review on Electrohydrodynamic-inkjet Printing Technology
Electrohydrodynamic (EHD)-inkjet printing is a novel high resolution inkjet printing technology with the advantages of being a maskless, non-contact, direct-write and additive process. Its printing resolution exceeds by about two orders of magnitude in comparison to the conventional inkjet printing systems. It is used in the field of micro/nano manufacturing for patterning of large class of mat...
متن کاملMicro Fabrication Technology of Ferroelectric Film and its Application to MEMS
Technological problems for realization of Micro Electro-mechanical System (MEMS) are discussed and an introduction of smart materials (PZT) is encouraged. The film formation and micromachining technology are discussed in integration of PZT thin films into MEMS. Further developments are proposed on PZT micro sensors and actuators with special emphasis laid on exploration of new application field...
متن کاملSimulation and Modeling of a High Sensitivity Micro-electro-mechanical Systems Capacitive Pressure Sensor with Small Size and Clamped Square Diaphragm
This paper proposes a Micro-electro-mechanical (MEMS) capacitive pressure sensor that relies on the movable electrode displaced like a flat plate equal to the maximum center deflection of diaphragm. The diaphragm, movable electrode and mechanical coupling are made of polysilicon, gold and Si3N4, respectively. The fixed electrode is gold and the substrate is Pyrex glass. This proposed method inc...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره شماره
صفحات -
تاریخ انتشار 2013